Invention Grant
- Patent Title: Semiconductor device including bonding pads and method of manufacturing the same
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Application No.: US17009234Application Date: 2020-09-01
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Publication No.: US11380638B2Publication Date: 2022-07-05
- Inventor: Masayoshi Tagami
- Applicant: Kioxia Corporation
- Applicant Address: JP Minato-ku
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2020-029644 20200225
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/00 ; H01L25/18 ; H01L27/11556 ; H01L27/11582

Abstract:
In one embodiment, a semiconductor device includes a substrate, a first interconnection provided above the substrate, and a first pad provided on the first interconnection. The device further includes a second pad provided on the first pad, and a second interconnection provided on the second pad. Furthermore, the first pad includes a first layer provided in a first insulator above the substrate, and a second layer that is provided in the first insulator via the first layer and is in contact with the first interconnection, or the second pad includes a third layer provided in a second insulator above the substrate, and a fourth layer that is provided in the second insulator via the third layer and is in contact with the second interconnection.
Public/Granted literature
- US20210265293A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2021-08-26
Information query
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