Invention Grant
- Patent Title: Vacuum pressure proportional control valve
-
Application No.: US16747711Application Date: 2020-01-21
-
Publication No.: US11384864B2Publication Date: 2022-07-12
- Inventor: Yoshiyuki Yamada , Shunsuke Umezawa
- Applicant: CKD CORPORATION
- Applicant Address: JP Komaki
- Assignee: CKD CORPORATION
- Current Assignee: CKD CORPORATION
- Current Assignee Address: JP Komaki
- Agency: Oliff PLC
- Priority: JPJP2019-017803 20190204
- Main IPC: F16K31/122
- IPC: F16K31/122 ; F16K51/02 ; F04C14/18 ; F16K27/07 ; F16K27/00 ; F04C13/00 ; F16K99/00

Abstract:
A vacuum pressure proportional control valve placed on a pipe connecting between a reaction vessel and a vacuum pump to control the vacuum pressure in the reaction vessel includes a cylinder provided with a piston chamber, a piston housed in the piston chamber so as to make reciprocal linear movement, a valve seat surface, and a valve element which contacts with or separates from the valve seat surface according to the movement of the piston. A stopper member is provided in the cylinder so that a leading end portion of the stopper member is placed in the piston chamber. The stopper member is configured to move the piston back and forth in a moving direction of the piston by use of an adjusting unit to thereby adjust the position of the leading end portion.
Public/Granted literature
- US20200248685A1 VACUUM PRESSURE PROPORTIONAL CONTROL VALVE Public/Granted day:2020-08-06
Information query