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公开(公告)号：US11530751B2
公开(公告)日：2022-12-20
申请号：US16651192
申请日：2018-09-28
发明人： Tuan Anh Nguyen
摘要： The present disclosure generally relates to an isolation device for use in processing systems. The isolation device includes a body having a flow aperture formed therethrough. In one embodiment, the isolation device is disposed between a remote plasma source and a process chamber. A closure mechanism is pivotally disposed within the body. The closure mechanism can be actuated to enable or disable fluid communication between the remote plasma source and the process chamber. In one embodiment, the closure mechanism includes a shaft and a seal plate coupled to the shaft. A cross-arm is coupled to the shaft opposite the seal plate. The cross-arm is configured to selectively rotate the shaft and the seal plate of the closure mechanism.
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公开(公告)号：US20220211234A1
公开(公告)日：2022-07-07
申请号：US17604978
申请日：2020-05-19
发明人： Weidong LU , Shuhua SANG , Xiaoyu LIU
IPC分类号： A47L9/20 , A47L5/36 , A47L9/12 , B01D46/58 , B01D46/24 , B01D46/71 , B01D46/42 , B01D46/00 , F16K11/076 , F16K51/02
摘要： Provided is a vacuum cleaner. The switching valve apparatus of the vacuum cleaner includes an outer casing and a counterflow air passage. The outer casing is provided with a first vent opening and a second vent opening arranged side by side along the circumferential direction of the outer casing. In the case where the counterflow air passage is at the first angular position, the outer casing seals the counterflow air outlet of the counterflow air passage; in the case where the counterflow air passage is at the second angular position, the counterflow air outlet communicates with the first vent opening and is staggered with the second vent opening; and in the case where the counterflow air passage is at the third angular position, the counterflow air outlet communicates with the second vent opening and is staggered with the first vent opening.
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3.发明授权公开(公告)号：US11326699B2
公开(公告)日：2022-05-10
申请号：US17159570
申请日：2021-01-27
申请人： VAT Holding AG
发明人： Thomas Blecha
摘要： A connecting apparatus for the connection of a valve rod (4) to a closure member (1) of a vacuum valve, with a connecting body (12) which is arranged between a first connecting part (10) and a second connecting part (11). The connecting body (12) has a basic shape of a Steinmetz body which is formed by way of a intersection of two circular cylinders. The connecting body (12) is arranged in an intermediate space between arm projections (24, 25) of the first connecting part (10) and in an intermediate space between arm projections (26, 27) of the second connecting part (11). Corresponding bearing faces (28, 29, 30, 31) of the arm projections (24, 25, 26, 27) bear against bearing faces (13, 14, 15, 16) of the connecting body (12). The two arm projections (24, 25, 26, 27) of the respective connecting part (10, 11) approach one another towards their free ends.
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公开(公告)号：US20220136609A1
公开(公告)日：2022-05-05
申请号：US17431386
申请日：2020-02-12
申请人： VAT Holding AG
发明人： Martin Netzer
IPC分类号： F16K3/02 , F16K3/18 , F16K31/528 , F16K51/02
摘要： The invention relates to a vacuum valve (10) for the substantially gas-tight closure of an opening defining an opening axis, comprising a closure element (14) having a closure side and a coupling unit arranged on a rear side opposite the closure side, and a valve wall having valve seat (12a) surrounding the opening. The valve further comprises a linear drive unit by means of which the closure element (14) is adjustable in at least two adjustment directions substantially orthogonally to the opening axis along an adjustment axis and thus the closure element (14) is adjustable between an open position releasing the opening, an intermediate position pushed over the opening and a closed position closing the opening. The vacuum valve (10) comprises a guide for the closure element (14) associated with the opening. The closure element (14) comprises a guide element (25) interacting with the guide during an adjustment from the open position to the closed position and back, and the guide and the guide element (25) are shaped and interact in such a way that, in the course of the adjustment from the intermediate position to the closed position, a tilting of the closure element (14) transversely to the adjustment axis is initiated and/or effected in a first partial movement.
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公开(公告)号：US11215297B2
公开(公告)日：2022-01-04
申请号：US16627246
申请日：2018-06-28
申请人： VAT HOLDING AG
发明人： Adrian Eschenmoser , Andreas Hofer
摘要： Disclosed is a vacuum valve having a valve seat, which has a valve opening, defining an opening axis, and a first sealing surface, a valve closure having a second sealing surface corresponding to the first sealing surface, a drive unit coupled to the valve closure, which can be moved from an open position, in which the valve closure and the valve seat do not contact each other, to a closed position, in which there is a sealing contact between the first sealing surface and the second sealing surface by a seal there between, and the valve opening is sealed gastight as a result. The vacuum valve has at least one temperature sensor, where the temperature sensor is designed and arranged such that, from the temperature sensor, a measurement signal representing thermal information in respect of at least one part of the vacuum valve can be detected.
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公开(公告)号：US11174950B2
公开(公告)日：2021-11-16
申请号：US16905299
申请日：2020-06-18
申请人： SMC CORPORATION
发明人： Hiromi Shimoda , Hiroshi Ogawa , Takashi Nagao , Tsuyoshi Ochi
摘要： A spacer having a wedge-shaped flat plate portion and an engagement protrusion is interposed between a hole end surface of mounting hole of a valve plate and a rod end surface of mounting portion of a valve rod, which thereby forms a wedge-shaped gap between the spacer and the hole end surface so as to open frontward. A fastening force of a valve-plate fixation screw generates a moment M that deforms the valve plate in a direction of narrowing the gap. At the same time, the engagement protrusion of the spacer is pressed into a wedge-shaped space between the inclined surface portion of the rod end surface and the rear hole-wall surface of the mounting hole, which causes the front hole-wall surface of mounting hole of the valve plate to press the rod front surface of mounting portion of the valve rod.
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公开(公告)号：US11131394B2
公开(公告)日：2021-09-28
申请号：US16332518
申请日：2017-09-26
申请人： VAT HOLDING AG
发明人： Martin Netzer
摘要： A closure device (1) for an opening (2) in a chamber wall (3) is provided, wherein the closure device (1) has at least one closure element (4) and at least one closure element carrier body (5) and at least one yoke (6). The closure element (4) is fixedly connected to the yoke (6) by the closure element carrier body (5), wherein the yoke (6) is mounted in a housing (9) of the closure device (1) in such a way that the yoke can be slid by at least one cylinder-piston drive unit (7) of the closure device (1), in particular parallel to a longitudinal extent (8) of the closure element carrier body (5). The yoke (6) has at least one cylinder cavity (10) of the cylinder-piston drive unit (7) and/or at least one guide element receptacle (11) for guiding a guide element (12) of the closure device (1).
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公开(公告)号：US11077980B2
公开(公告)日：2021-08-03
申请号：US16314235
申请日：2017-06-29
申请人： Sang Woo Hwang
发明人： Sang Woo Hwang
IPC分类号： B65D51/16 , B65D1/22 , B65D1/40 , B65D81/20 , B65D81/24 , F16K51/02 , F16K15/00 , B65D47/18 , B65D43/02
摘要： A vacuum-sealed container wherein a large negative pressure is applied inside the container without using a pump, making it possible to store food for a long time; the container can be sealed without using a packing. The vacuum-sealed container includes: a container body having a lid coupling groove formed along the periphery of the upper end portion of an opening and arranged along a closed path; a lid body formed to be convex upward using an elastic material, the lid body having a sealing portion formed thereon such that the same is inserted into the lid coupling groove along the periphery thereof so as to seal the inside of the container body; and a valve installed on the lid body so as to provide a passage, through which air inside the container body is discharged to the outside, and so as to expose/cover the passage.
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公开(公告)号：US11043367B2
公开(公告)日：2021-06-22
申请号：US16431874
申请日：2019-06-05
申请人： Shimadzu Corporation
发明人： Kosuke Hosoi
IPC分类号： F16K51/02 , F16K31/52 , H01J49/04 , F16H21/44 , F16K1/30 , F16K31/44 , F16K31/524 , H01H33/666 , H01H33/66
摘要： Provided is a valve 130 which requires only a small space for the open/close operation of an opening 113 in a partition wall. A sealing part 140 includes a sealing member 141 for sealing the opening by being pressed onto the partition wall around the opening. An urging means 144 urges the sealing member 141 against the opening when the sealing member 141 is in contact with the opening. A driving means 160 generates a driving force orthogonal to an opening central axis A which is an axis perpendicular to a partition plate 111 and passing through the center of the opening. A linkage 150, which is a Scott Russell linkage connecting the sealing part 140 and the driving means 160, converts the driving force of the driving means 160 into a driving force which is parallel to the opening central axis A and makes the sealing part 140 move along the same axis.
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公开(公告)号：US20210080028A1
公开(公告)日：2021-03-18
申请号：US17016437
申请日：2020-09-10
发明人： Torsten DSAAK , Michael HOFMANN , Thomas MEYER
摘要： According to various aspects of the disclosure, a valve assembly for a vacuum chamber housing may have: a valve housing, which has a substrate transfer gap; a valve flap, which is mounted so as to be rotatable about an axis of rotation, thus enabling said flap to be rotated into a first position and into a second position, wherein the axis of rotation is arranged in the substrate transfer gap, and wherein the substrate transfer gap is extended longitudinally along the axis of rotation; wherein the valve flap closes the substrate transfer gap in the first position and is arranged adjacent to the substrate transfer gap in the second position.
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