Invention Grant
- Patent Title: Phase change material in substrate cavity
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Application No.: US16158186Application Date: 2018-10-11
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Publication No.: US11387224B2Publication Date: 2022-07-12
- Inventor: Cheng Xu , Zhimin Wan , Yikang Deng , Junnan Zhao , Chong Zhang , Chandra Mohan M Jha , Ying Wang , Kyu-oh Lee
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L23/34
- IPC: H01L23/34 ; H01L25/18 ; H01L23/00 ; H01L23/538 ; F28D20/02

Abstract:
A semiconductor device package structure is provided. The semiconductor device package structure includes a substrate having a cavity, and phase change material within the cavity. In an example, the phase change material has a phase change temperature lower than 120 degree centigrade. A die may be coupled to the substrate. In an example, the semiconductor device package structure includes one or more interconnect structures that are to couple the die to the phase change material within the cavity.
Information query
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