- 专利标题: Semiconductor memory device structure
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申请号: US16810572申请日: 2020-03-05
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公开(公告)号: US11387239B2公开(公告)日: 2022-07-12
- 发明人: Chih Cheng Liu
- 申请人: Changxin Memory Technologies, Inc.
- 申请人地址: CN Anhui
- 专利权人: Changxin Memory Technologies, Inc.
- 当前专利权人: Changxin Memory Technologies, Inc.
- 当前专利权人地址: CN Anhui
- 代理机构: Sheppard Mullin Richter & Hampton LLP
- 优先权: CN201710796600.7 20170906
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
A transistor structure of a semiconductor memory device comprises: an active area having a plurality of trenches and a substrate surface, the trenches having openings oriented toward the substrate surface; a plurality of gate structures embedded in the trenches, wherein the substrate surface comprises source regions located on outer sides of the gate structures and a drain region located between the gate structures; node contacts each disposed on one of the source regions; a bit line contact disposed on the drain region and connectable to a bit line, the node contacts sharing the bit line contact through adjacent gate structures, wherein the drain region comprises a first ion implantation layer extending inwardly from the bit line contact, each of the source regions comprising a second ion implantation layer extending inwardly from a corresponding node contact, the first ion implantation layer being deeper than the second ion implantation layer.
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