Invention Grant
- Patent Title: Etching composition for thin film containing silver, method for forming pattern and method for manufacturing a display device using the same
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Application No.: US16575593Application Date: 2019-09-19
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Publication No.: US11407943B2Publication Date: 2022-08-09
- Inventor: Jonghee Park , Kitae Kim , Jinseock Kim , Gyu-Po Kim , Hyun-Cheol Shin , Dae-Woo Lee , Sang-Hyuk Lee
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR10-2018-0138164 20181112
- Main IPC: C09K13/06
- IPC: C09K13/06 ; C23F1/16
Abstract:
An etching composition for a silver-containing thin film includes an inorganic acid compound, a carboxylic acid compound, a sulfonic acid compound, a glycol compound, a nitrogen-containing dicarbonyl compound, a metal-based oxidizer, and water.
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