Invention Grant
- Patent Title: Spectral sensor for multispectral imaging
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Application No.: US16592228Application Date: 2019-10-03
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Publication No.: US11408769B2Publication Date: 2022-08-09
- Inventor: Nicolaas Tack , Nick Spooren , Bart Vereecke
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP18198547 20181004
- Main IPC: G01J3/28
- IPC: G01J3/28 ; G01J3/36

Abstract:
A spectral sensor comprises (i) a first type of interference filter comprising reflective multilayers of a first type and an intermediate layer configured to give a constructive interference for a wavelength in a first range, and (ii) a second type of interference filter comprising reflective multilayers of a second type and an intermediate layer configured to give a constructive interference for a wavelength in a second range. The sensor further comprises first and second filter stacks configured to selectively transmit light in the first and second wavelength ranges to first and second photo-sensitive areas, respectively. The first filter stack includes the first type of interference filter and a second type of dielectric mirror that is reflective in the second wavelength range. The second filter stack includes the second type of interference filter and a first type of dielectric mirror that is reflective in the first wavelength range.
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