- 专利标题: Ultrasonic transducer with via formed in piezoelectric element and method of fabricating an ultrasonic transducer including milling a piezoelectric substrate
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申请号: US16204249申请日: 2018-11-29
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公开(公告)号: US11417309B2公开(公告)日: 2022-08-16
- 发明人: James M Chwalek , Todd A Jackson
- 申请人: Ascent Ventures, LLC
- 申请人地址: US NY Pittsford
- 专利权人: Ascent Ventures, LLC
- 当前专利权人: Ascent Ventures, LLC
- 当前专利权人地址: US NY Pittsford
- 代理机构: Brown & Michaels, PC
- 主分类号: G01N29/24
- IPC分类号: G01N29/24 ; G10K11/32 ; G10K11/02 ; G01N29/28 ; G01N29/04 ; H01L41/25
摘要:
An ultrasonic transducer that includes a delay line, an active piezoelectric element, and interposing metal conductive layer between the delay line and active piezoelectric element. The delay line and active piezoelectric element are joined so that ultrasonic waves may be coupled from the active piezoelectric element into the delay line or from the delay line into the active piezoelectric element. A via is formed, using a milling operation, in the active piezoelectric element to expose the edge of the interposing metal conductive layer between the delay line and active piezoelectric element. A conductive layer makes electrical contact between the interposing metal conductive layer and the surface of the active piezoelectric element to allow an electrical connection to be made from the surface of the active piezoelectric element to the interposing metal conductive layer.
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