- 专利标题: Transport fixing jig
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申请号: US16084628申请日: 2017-03-14
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公开(公告)号: US11420832B2公开(公告)日: 2022-08-23
- 发明人: Shotaro Masuda , Tomoaki Ichikawa , Yohei Maeno , Yoshiharu Hatakeyama
- 申请人: NITTO DENKO CORPORATION
- 申请人地址: JP Ibaraki
- 专利权人: NITTO DENKO CORPORATION
- 当前专利权人: NITTO DENKO CORPORATION
- 当前专利权人地址: JP Ibaraki
- 代理机构: Sughrue Mion, PLLC
- 优先权: JPJP2016-055245 20160318,JPJP2017-046313 20170310
- 国际申请: PCT/JP2017/010140 WO 20170314
- 国际公布: WO2017/159661 WO 20170921
- 主分类号: B32B9/04
- IPC分类号: B32B9/04 ; B65G49/07 ; H01L21/673 ; H01L21/687 ; B32B5/02 ; B32B7/12 ; H01L21/677 ; H01L21/683
摘要:
Provided is a transport fixing jig that has a high gripping force, hardly contaminates an object to be processed (object to be transported), and is excellent in heat resistance. The transport fixing jig of the present invention includes: a first base material; a carbon nanotube aggregate; and an adhesive layer arranged between the first base material and the carbon nanotube aggregate, wherein the first base material and the carbon nanotube aggregate are bonded to each other via the adhesive layer, and wherein a ratio (adhesive layer/base material) between a linear expansion coefficient of the first base material and a linear expansion coefficient of the adhesive layer is from 0.7 to 1.8.
公开/授权文献
- US20190071265A1 TRANSPORT FIXING JIG 公开/授权日:2019-03-07
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