Invention Grant
- Patent Title: Sputtering target and method of producing sputtering target
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Application No.: US16759149Application Date: 2019-03-28
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Publication No.: US11421315B2Publication Date: 2022-08-23
- Inventor: Xiaoli Lu , Junichi Nitta , Akira Nakamura , Miho Satou
- Applicant: ULVAC, INC.
- Applicant Address: JP Chigasaki
- Assignee: ULVAC, INC.
- Current Assignee: ULVAC, INC.
- Current Assignee Address: JP Chigasaki
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Priority: JPJP2018-140853 20180727
- International Application: PCT/JP2019/013572 WO 20190328
- International Announcement: WO2020/021772 WO 20200130
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C22C19/07 ; C22F1/10 ; H01F41/18

Abstract:
[Object] To provide a sputtering target with further improved sputtering efficiency, and a method of producing the sputtering target.
[Solving Means] In order to achieve the above-mentioned object, a sputtering target according to an embodiment of the present invention is a cobalt target having a sputtering surface and a purity of 99.95 wt % or more. An intensity ratio (I(002)+I(004))/(I(100)+I(002)+I(101)+I(102)+I(110)+I(103)+I(112)+I(004)) of X-ray diffraction peaks corresponding to a (100) plane, a (002) plane, a (101) plane, a (102) plane, a (110) plane, a (103) plane, a (112) plane, and a (004) plane of a hexagonal close-packed lattice structure along the sputtering surface is 0.85 or more.
[Solving Means] In order to achieve the above-mentioned object, a sputtering target according to an embodiment of the present invention is a cobalt target having a sputtering surface and a purity of 99.95 wt % or more. An intensity ratio (I(002)+I(004))/(I(100)+I(002)+I(101)+I(102)+I(110)+I(103)+I(112)+I(004)) of X-ray diffraction peaks corresponding to a (100) plane, a (002) plane, a (101) plane, a (102) plane, a (110) plane, a (103) plane, a (112) plane, and a (004) plane of a hexagonal close-packed lattice structure along the sputtering surface is 0.85 or more.
Public/Granted literature
- US20210172056A1 SPUTTERING TARGET AND METHOD OF PRODUCING SPUTTERING TARGET Public/Granted day:2021-06-10
Information query
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