Invention Grant
- Patent Title: Elastic guiding device, positioning device, blade and lithographic apparatus
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Application No.: US17421694Application Date: 2019-12-12
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Publication No.: US11421729B2Publication Date: 2022-08-23
- Inventor: Erwin Andreas Bernardus Mulder , Krijn Frederik Bustraan , Antonius Franciscus Johannes De Groot , Rinze Koolstra , Paul Peter Anna Antonius Brom
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP19151307 20190111,EP19201930 20191008
- International Application: PCT/EP2019/084979 WO 20191212
- International Announcement: WO2020/143993 WO 20200716
- Main IPC: F16C11/12
- IPC: F16C11/12 ; G03F7/20
Abstract:
The invention relates to elastic guiding device to support a mass with respect to a base in a support direction, wherein the stiffness in support direction compared to stiffness in other direction, for example the stiffness in vertical direction compared to the stiffness in horizontal directions is substantially increased. The invention further relates to a positioning device comprising at least one elastic guiding device, and a lithographic apparatus comprising such positioning device.
Public/Granted literature
- US20220082126A1 ELASTIC GUIDING DEVICE, POSITIONING DEVICE, BLADE AND LITHOGRAPHIC APPARATUS Public/Granted day:2022-03-17
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