Invention Grant
- Patent Title: Carousel for ultrasonic cleaning and method of using thereof
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Application No.: US16953156Application Date: 2020-11-19
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Publication No.: US11433436B2Publication Date: 2022-09-06
- Inventor: Michael J. Coughlin , Allen L. D'Ambra
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: B08B3/12
- IPC: B08B3/12 ; B08B13/00

Abstract:
Disclosed herein is a sonic cleaning insert. In one example, the sonic cleaning insert includes a carousel configured to rotate about a central axis. The carousel further includes a platform having an outer perimeter. The platform is radially disposed about the central axis. The carousel has an inner ring and an outer ring circumscribing the inner ring. A plurality of partitions couple the inner ring and the outer ring to the platform. The plurality of partitions are arranged at a predetermined angle about the central axis. The carousel further includes a plurality of holders. Each holder is formed from a portion of the platform, a portion of each of the inner ring and outer ring, and a first sidewall and a second sidewall formed from the plurality of partitions. The carousel is configured for immersion in an ultrasonic vibrating fluid.
Public/Granted literature
- US20220152666A1 CAROUSEL FOR ULTRASONIC CLEANING AND METHOD OF USING THEREOF Public/Granted day:2022-05-19
Information query
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