Invention Grant
- Patent Title: Heated ceramic faceplate
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Application No.: US17040335Application Date: 2019-03-19
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Publication No.: US11434568B2Publication Date: 2022-09-06
- Inventor: Juan Carlos Rocha-Alvarez , David H. Quach
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- International Application: PCT/US2019/022958 WO 20190319
- International Announcement: WO2019/203975 WO 20191024
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/455 ; C23C16/50 ; C23C16/509
Abstract:
An apparatus for distributing a gas within a process chamber is disclosed. The apparatus has a body formed from a distribution portion surrounded by a coupling portion. A heater is disposed within the distribution portion to heat the body to an elevated temperature. A bridge extends between the coupling portion and the distribution portion. The bridge limits heat transfer between the distribution portion and the coupling portion.
Public/Granted literature
- US20210363635A1 HEATED CERAMIC FACEPLATE Public/Granted day:2021-11-25
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