发明授权
- 专利标题: Semiconductor memory device and method of manufacturing semiconductor memory device
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申请号: US16987732申请日: 2020-08-07
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公开(公告)号: US11437388B2公开(公告)日: 2022-09-06
- 发明人: Kosei Noda , Go Oike
- 申请人: Kioxia Corporation
- 申请人地址: JP Minato-ku
- 专利权人: Kioxia Corporation
- 当前专利权人: Kioxia Corporation
- 当前专利权人地址: JP Minato-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JPJP2019-170456 20190919
- 主分类号: H01L27/11524
- IPC分类号: H01L27/11524 ; H01L27/11551 ; H01L27/1157 ; H01L27/11565 ; H01L27/11519 ; H01L27/11578
摘要:
A semiconductor memory device includes a substrate, a first stack, a plurality of first columnar portions, a second stack, a plurality of second columnar portions, and a third stack. In the first stack, first conductive layers and first insulating layers are alternately stacked in a thickness direction of the substrate. Each of the plurality of first pillars extends inside the first stack in the thickness direction. In the second stack, second conductive layers and second insulating layers are alternately stacked in the thickness direction. Each of the plurality of second pillars extends inside the second stack in the thickness direction. The third stack is positioned between the first stack and the second stack in the first direction. In the third stack, third insulating layers and fourth insulating layers including a material different from a material of the third insulating layer are alternately stacked in the thickness direction of the substrate.
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