- 专利标题: Stretchable electronic device and method of fabricating the same
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申请号: US16612882申请日: 2018-03-22
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公开(公告)号: US11437579B2公开(公告)日: 2022-09-06
- 发明人: Jin Jang , Min Sang Park
- 申请人: UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
- 申请人地址: KR Yongin-si
- 专利权人: UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
- 当前专利权人: UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
- 当前专利权人地址: KR Yongin-si
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR10-2017-0062564 20170519
- 国际申请: PCT/KR2018/003305 WO 20180322
- 国际公布: WO2018/212443 WO 20181122
- 主分类号: H01L51/00
- IPC分类号: H01L51/00 ; H01L51/50 ; H01L25/13 ; H01L29/66 ; H01L29/786 ; H01L27/12
摘要:
Disclosed is a method of fabricating a stretchable electronic device, the method including a step of forming one or more semiconductor devices on a first carrier substrate; a step of forming semiconductor device array patterns by separating semiconductor device arrays each including the semiconductor devices; a step of releasing the semiconductor device array patterns from the first carrier substrate; a step of forming a stretchable substrate on a second carrier substrate; and a step of transferring the released semiconductor device array patterns onto the stretchable substrate.
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