Invention Grant
- Patent Title: Methods to clean chemical mechanical polishing systems
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Application No.: US16584874Application Date: 2019-09-26
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Publication No.: US11446785B2Publication Date: 2022-09-20
- Inventor: Chih-Chieh Chang , Yen-Ting Chen , Hui-Chi Huang , Kei-Wei Chen
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Seeed IP Law Group LLP
- Main IPC: B24B53/017
- IPC: B24B53/017 ; B24B37/20

Abstract:
Provided herein are chemical-mechanical planarization (CMP) systems and methods to reduce metal particle pollution on dressing disks and polishing pads. Such methods may include contacting a dressing disk and at least one conductive element with an electrolyte solution and applying direct current (DC) power to the dressing disk and the at least one conductive element.
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