- 专利标题: Ultrasonic bonding apparatus and method for ultrasonic bonding using the same
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申请号: US17388475申请日: 2021-07-29
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公开(公告)号: US11446878B2公开(公告)日: 2022-09-20
- 发明人: Chan-Jae Park , Minsoo Kim , Yoona Kim , Soo Yeon Han , Sunok Oh , Kikyung Youk , Sangduk Lee , Hyun A Lee
- 申请人: Samsung Display Co., Ltd.
- 申请人地址: KR Yongin-Si
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin-Si
- 代理机构: Cantor Colburn LLP
- 优先权: KR10-2020-0103385 20200818
- 主分类号: B29C65/00
- IPC分类号: B29C65/00 ; B29C65/08 ; H05K3/30 ; B29C65/48 ; B29L31/34
摘要:
An ultrasonic bonding apparatus includes a stage having an upper surface on a plane defined by a first direction and a second direction crossing the first direction, a head part spaced apart from the stage in a third direction crossing the first direction and the second direction, a first ultrasonic generator which vibrates in a direction parallel to the first direction, and a second ultrasonic generator which vibrates in a direction parallel to the third direction, where each of the first ultrasonic generator and the second ultrasonic generator may be coupled to the stage or the head part.
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