- 专利标题: Nonvolatile memory device with a metal-insulator-metal (MIM) capacitor in a substrate and integration schemes
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申请号: US17100954申请日: 2020-11-23
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公开(公告)号: US11456306B2公开(公告)日: 2022-09-27
- 发明人: Bong Woong Mun , Jeoung Mo Koo
- 申请人: GLOBALFOUNDRIES Singapore Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: GLOBALFOUNDRIES Singapore Pte. Ltd.
- 当前专利权人: GLOBALFOUNDRIES Singapore Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 代理商 David Cain
- 主分类号: H01L27/11521
- IPC分类号: H01L27/11521 ; H01L49/02 ; H01L29/06 ; H01L29/788 ; H01L29/66
摘要:
A nonvolatile memory device is provided. The nonvolatile memory device comprises a floating gate arranged over a first active region, whereby the first active region is in an active layer of a substrate. A metal-insulator-metal (MIM) capacitor may be provided laterally adjacent to the floating gate, whereby a portion of the metal-insulator-metal capacitor is in the active layer. A contact pillar may connect a first electrode of the metal-insulator-metal capacitor to the floating gate.
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