Invention Grant
- Patent Title: In-situ drift-mitigation liner for pillar cell PCM
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Application No.: US17105699Application Date: 2020-11-27
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Publication No.: US11456413B2Publication Date: 2022-09-27
- Inventor: Karthik Yogendra , Praneet Adusumilli
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Otterstedt & Kammer PLLC
- Agent Min Jia Zheng
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
A method for forming an in-situ drift-mitigation liner on a sidewall of a phase-change material (PCM) device stack includes providing an intermediate device including a substrate including a bottom wiring portion, a bottom electrode metal layer, a drift-mitigation liner layer, an active area layer, a carbon layer, a top electrode metal layer, patterning the top electrode metal layer to form a top electrode, performing a first intermediate angle ion beam etch (IBE), etching the carbon layer and the active area layer, which are formed on the drift-mitigation liner, to form a carbon portion and an active area portion of the PCM device stack, and performing a low angle IBE, etching the drift-mitigation liner and redepositing material etched from the drift-mitigation liner as a conductive liner material on sidewalls of the PCM device stack including exposed portions of the carbon portion, the active area portion, and the top electrode.
Public/Granted literature
- US20220173308A1 In-situ drift-mitigation liner for pillar cell PCM Public/Granted day:2022-06-02
Information query
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