Invention Grant
- Patent Title: Mirror device
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Application No.: US16636482Application Date: 2018-08-03
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Publication No.: US11474345B2Publication Date: 2022-10-18
- Inventor: Daiki Suzuki , Takuma Osaki
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JPJP2017-155311 20170810
- International Application: PCT/JP2018/029301 WO 20180803
- International Announcement: WO2019/031420 WO 20190214
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00 ; G02B7/182 ; G02B26/10

Abstract:
A mirror device includes a support portion, a movable portion, and a pair of torsion bars disposed on both sides of the movable portion on a first axis. The movable portion includes a frame-shaped frame connected to the pair of torsion bars and a mirror unit disposed inside the frame. The mirror unit is connected to the frame in each of a pair of connection regions located on both sides of the mirror unit in a direction parallel to a second axis. A region other than the pair of connection regions in a region between the mirror unit and the frame is a space. An outer edge of the mirror unit and an inner edge of the frame are connected to each other so that a curvature in each of the pair of connection regions is continuous when viewed from a direction perpendicular to the first and the second axes.
Public/Granted literature
- US20200249463A1 MIRROR DEVICE Public/Granted day:2020-08-06
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