Invention Grant
- Patent Title: Increasing signal-to-noise ratio in optical imaging of defects on unpatterned wafers
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Application No.: US16861094Application Date: 2020-04-28
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Publication No.: US11474437B2Publication Date: 2022-10-18
- Inventor: Yechiel Kapoano , Binyamin Kirshner , David Goldovsky
- Applicant: APPLIED MATERIALS ISRAEL LTD.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G01N21/88 ; G01N21/956 ; G01N21/95 ; G03F1/84 ; F21V8/00

Abstract:
Disclosed herein is a method for increasing signal-to-noise (SNR) in optical imaging of defects on unpatterned wafers. The method includes: (i) irradiating a region of an unpatterned wafer with a substantially polarized, incident light beam, and (ii) employing relay optics to collect and guide, radiation scattered off the region, onto a segmented polarizer comprising at least four polarizer segments characterized by respective dimensions and polarization directions. The respective dimensions and polarization direction of each of the at least four polarizer segments are such that an overall power of background noise radiation, generated in the scattering of the incident light beam from the region and passed through all of the at least four polarizer segments, is decreased as compared to utilizing a linear polarizer.
Public/Granted literature
- US20210333719A1 INCREASING SIGNAL-TO-NOISE RATIO IN OPTICAL IMAGING OF DEFECTS ON UNPATTERNED WAFERS Public/Granted day:2021-10-28
Information query
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