Invention Grant
- Patent Title: Automatic ESC bias compensation when using pulsed DC bias
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Application No.: US16197006Application Date: 2018-11-20
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Publication No.: US11476145B2Publication Date: 2022-10-18
- Inventor: James Rogers , Linying Cui , Leonid Dorf
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01J37/32 ; H01J37/248

Abstract:
Disclosed herein is a system for pulsed DC biasing and clamping a substrate. The system can include a plasma chamber having an ESC for supporting a substrate. An electrode is embedded in the ESC and is electrically coupled to a biasing and clamping circuit. The biasing and clamping circuit includes at least a shaped DC pulse voltage source and a clamping network. The clamping network includes a DC voltage source and a diode, and a resistor. The shaped DC pulse voltage source and the clamping network are connected in parallel. The biasing and clamping network automatically maintains a substantially constant clamping voltage, which is a voltage drop across the electrode and the substrate when the substrate is biased with pulsed DC voltage, leading to improved clamping of the substrate.
Public/Granted literature
- US20200161155A1 AUTOMATIC ESC BIAS COMPENSATION WHEN USING PULSED DC BIAS Public/Granted day:2020-05-21
Information query
IPC分类: