Invention Grant
- Patent Title: Manufacturing method of chip package
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Application No.: US16950810Application Date: 2020-11-17
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Publication No.: US11476293B2Publication Date: 2022-10-18
- Inventor: Yen-Shih Ho , Tsang-Yu Liu , Po-Han Lee
- Applicant: XINTEC INC.
- Applicant Address: TW Taoyuan
- Assignee: XINTEC INC.
- Current Assignee: XINTEC INC.
- Current Assignee Address: TW Taoyuan
- Agency: Liu & Liu
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L23/00

Abstract:
A manufacturing method of a chip package includes forming a temporary bonding layer on a carrier; forming an encapsulation layer on a top surface of a wafer or on the temporary bonding layer; bonding the carrier to the wafer, in which the encapsulation layer covers a sensor and a conductive pad of the wafer; patterning a bottom surface of the wafer to form a through hole, in which the conductive pad is exposed through the through hole; forming an isolation layer on the bottom surface of the wafer and a sidewall of the through hole; forming a redistribution layer on the isolation layer and the conductive pad that is in the through hole; forming a passivation layer on the isolation layer and the redistribution layer; and removing the temporary bonding layer and the carrier.
Public/Granted literature
- US20210066379A1 MANUFACTURING METHOD OF CHIP PACKAGE Public/Granted day:2021-03-04
Information query
IPC分类: