Invention Grant
- Patent Title: Thermal break for high-frequency antennae
-
Application No.: US16828602Application Date: 2020-03-24
-
Publication No.: US11488796B2Publication Date: 2022-11-01
- Inventor: Thai Cheng Chua , Hanh Nguyen , Philip Allan Kraus
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01H37/76
- IPC: H01H37/76 ; H05H1/46 ; H05K7/20 ; H01L35/28

Abstract:
Embodiments disclosed herein include a high-frequency emission module. In an embodiment, the high-frequency emission module comprises a solid state high-frequency power source, an applicator for propagating high-frequency electromagnetic radiation from the power source, and a thermal break coupled between the power source and the applicator. In an embodiment, the thermal break comprises a substrate, a trace on the substrate, and a ground plane.
Public/Granted literature
- US20200343065A1 THERMAL BREAK FOR HIGH-FREQUENCY ANTENNAE Public/Granted day:2020-10-29
Information query