Invention Grant
- Patent Title: Pattern forming method and template manufacturing method
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Application No.: US16817804Application Date: 2020-03-13
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Publication No.: US11493846B2Publication Date: 2022-11-08
- Inventor: Takeharu Motokawa , Noriko Sakurai , Ryu Komatsu , Hideaki Sakurai
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner L.L.P.
- Priority: JPJP2019-170879 20190919
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/09 ; G03F9/00 ; G03F7/00

Abstract:
According to one embodiment, a pattern forming method includes forming a resist film including a first core material pattern and a second core material pattern, on a first film laminated on a substrate; forming a second film at least on sidewalls of the first and second core material patterns; removing the first core material pattern while not removing the second core material pattern and the second film; and processing the first film by using, as a mask, the second core material pattern and the second film.
Public/Granted literature
- US20210088906A1 PATTERN FORMING METHOD AND TEMPLATE MANUFACTURING METHOD Public/Granted day:2021-03-25
Information query
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