Invention Grant
- Patent Title: Detecting defects in array regions on specimens
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Application No.: US17003452Application Date: 2020-08-26
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Publication No.: US11494895B2Publication Date: 2022-11-08
- Inventor: Siqing Nie , Chunwei Song , Zhuang Liu , Weifeng Zhou
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G06T7/00 ; G01N23/2251

Abstract:
Methods and systems for detecting defects in an array region on a specimen are provided. One method includes determining a center of a page break in output generated by an inspection subsystem for a specimen in an array region. The page break separates cell regions in the array region, and the cell regions include repeating patterned features. The method also includes determining an offset between the center of the page break in the output and a center of the page break in a design for the specimen and identifying portions of the output that correspond to care areas in the array region based on the offset. In addition, the method includes detecting defects in the array region by applying a defect detection method to the portions of the output that correspond to the care areas.
Public/Granted literature
- US20210256675A1 DETECTING DEFECTS IN ARRAY REGIONS ON SPECIMENS Public/Granted day:2021-08-19
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