公开(公告)号：US20210256675A1

公开(公告)日：2021-08-19

申请号：US17003452

申请日：2020-08-26

Applicant: KLA Corporation

Inventor： Siqing Nie ,  Chunwei Song ,  Zhuang Liu ,  Weifeng Zhou

IPC: G06T7/00 ,  G01N21/95 ,  G01N23/2251

Abstract: Methods and systems for detecting defects in an array region on a specimen are provided. One method includes determining a center of a page break in output generated by an inspection subsystem for a specimen in an array region. The page break separates cell regions in the array region, and the cell regions include repeating patterned features. The method also includes determining an offset between the center of the page break in the output and a center of the page break in a design for the specimen and identifying portions of the output that correspond to care areas in the array region based on the offset. In addition, the method includes detecting defects in the array region by applying a defect detection method to the portions of the output that correspond to the care areas.

公开(公告)号：US12190500B2

公开(公告)日：2025-01-07

申请号：US18178519

申请日：2023-03-05

Applicant: KLA Corporation

Inventor： Chunwei Song ,  Siqing Nie ,  Weifeng Zhou ,  Xiaochun Li ,  Sangbong Park

IPC: G06T7/00 ,  G06V10/74

Abstract: Methods and systems for detecting defects on a specimen are provided. One system computes different candidate reference images from different combinations of images of the specimen generated by an inspection subsystem and combines different portions of the candidate reference images without modification to thereby generate a final reference image. The final reference image is then used for defect detection, which may be single or double detection. The embodiments are particularly useful for defect detection in areas of specimens including only non-resolvable, repeating device patterns, like cell regions, but may be used for inspection of other types of areas as well.

公开(公告)号：US11494895B2

公开(公告)日：2022-11-08

申请号：US17003452

申请日：2020-08-26

Applicant: KLA Corporation

Inventor： Siqing Nie ,  Chunwei Song ,  Zhuang Liu ,  Weifeng Zhou

IPC: G01N21/95 ,  G06T7/00 ,  G01N23/2251

Abstract: Methods and systems for detecting defects in an array region on a specimen are provided. One method includes determining a center of a page break in output generated by an inspection subsystem for a specimen in an array region. The page break separates cell regions in the array region, and the cell regions include repeating patterned features. The method also includes determining an offset between the center of the page break in the output and a center of the page break in a design for the specimen and identifying portions of the output that correspond to care areas in the array region based on the offset. In addition, the method includes detecting defects in the array region by applying a defect detection method to the portions of the output that correspond to the care areas.

公开(公告)号：US20240296545A1

公开(公告)日：2024-09-05

申请号：US18178519

申请日：2023-03-05

Applicant: KLA Corporation

Inventor： Chunwei Song ,  Siqing Nie ,  Weifeng Zhou ,  Xiaochun Li ,  Sangbong Park

IPC: G06T7/00 ,  G06V10/74

CPC classification number: G06T7/001 ,  G06V10/74 ,  G06T2207/10024 ,  G06T2207/10061 ,  G06T2207/20224 ,  G06T2207/30148

Abstract: Methods and systems for detecting defects on a specimen are provided. One system computes different candidate reference images from different combinations of images of the specimen generated by an inspection subsystem and combines different portions of the candidate reference images without modification to thereby generate a final reference image. The final reference image is then used for defect detection, which may be single or double detection. The embodiments are particularly useful for defect detection in areas of specimens including only non-resolvable, repeating device patterns, like cell regions, but may be used for inspection of other types of areas as well.

公开(公告)号：US20240255448A1

公开(公告)日：2024-08-01

申请号：US18160989

申请日：2023-01-27

Applicant: KLA Corporation

Inventor： Siqing Nie ,  Chunwei Song ,  Chaoqing Wang ,  Weifeng Zhou ,  Xiaochun Li

IPC: G01N23/2251 ,  G01N21/95

CPC classification number: G01N23/2251 ,  G01N21/9501 ,  G01N2223/07 ,  G01N2223/6116 ,  G01N2223/646

Abstract: Methods and systems for detecting defects in an array region on a specimen are provided. One system includes an inspection subsystem configured for generating output responsive to patterned features formed in an array region on a specimen. The system also includes a computer subsystem configured for determining if a pitch of the patterned features in the output is an integer of pixels in a detector of the inspection subsystem that generated the output. When the pitch is not an integer of the pixels, the computer subsystem is configured for interpolating the output to generate interpolated output having a modified pitch of the patterned features in the interpolated output that is an integer of the pixels. The computer subsystem is also configured for detecting defects in the array region by applying a defect detection method to the interpolated output.