Invention Grant
- Patent Title: Neural network training device, system and method
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Application No.: US16687345Application Date: 2019-11-18
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Publication No.: US11501424B2Publication Date: 2022-11-15
- Inventor: Laurent Bidault
- Applicant: STMICROELECTRONICS (ROUSSET) SAS
- Applicant Address: FR Rousset
- Assignee: STMICROELECTRONICS (ROUSSET) SAS
- Current Assignee: STMICROELECTRONICS (ROUSSET) SAS
- Current Assignee Address: FR Rousset
- Agency: Seed Intellectual Property Law Group LLP
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06N3/04

Abstract:
A device includes image generation circuitry and convolutional-neural-network circuitry. The image generation circuitry, in operation, generates a digital image representation of a wafer defect map (WDM). The convolutional-neural-network circuitry, in operation, generates a defect classification associated with the WDM based on the digital image representation of the WDM and a data-driven model generated using an artificial wafer defect digital image (AWDI) data set and associating AWDIs with classes of a defined set of classes of wafer defects. A wafer manufacturing process may be controlled based on the classifications of WDMs.
Public/Granted literature
- US20210150688A1 NEURAL NETWORK TRAINING DEVICE, SYSTEM AND METHOD Public/Granted day:2021-05-20
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