Invention Grant
- Patent Title: Semiconductor reaction chamber showerhead
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Application No.: US16878443Application Date: 2020-05-19
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Publication No.: US11501956B2Publication Date: 2022-11-15
- Inventor: Carl White , Todd Dunn , Eric Shero , Kyle Fondurulia
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/455
Abstract:
A showerhead including a body having an opening, a first plate positioned within the opening and having a plurality of slots, a second plate positioned within the opening and having a plurality of slots, and wherein each of the first plate plurality of slots are concentrically aligned with the second plate plurality of slots.
Public/Granted literature
- US20200279721A1 SEMICONDUCTOR REACTION CHAMBER SHOWERHEAD Public/Granted day:2020-09-03
Information query
