- Patent Title: Resistive random access memory device and methods of fabrication
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Application No.: US16147199Application Date: 2018-09-28
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Publication No.: US11502254B2Publication Date: 2022-11-15
- Inventor: Nathan Strutt , Albert Chen , Oleg Golonzka
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A memory device structure includes a first electrode, a second electrode, a switching layer between the first electrode and the second electrode, where the switching layer is to transition between first and second resistive states at a voltage threshold. The memory device further includes an oxygen exchange layer between the switching layer and the second electrode, where the oxygen exchange layer includes a metal and a sidewall oxide in contact with a sidewall of the oxygen exchange layer. The sidewall oxide includes the metal of the oxygen exchange layer and oxygen, and has a lateral thickness that exceed a thickness of the switching layer.
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