Invention Grant
- Patent Title: Engineered actuators usable in MEMS active cooling devices
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Application No.: US17464422Application Date: 2021-09-01
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Publication No.: US11503742B2Publication Date: 2022-11-15
- Inventor: Vikram Mukundan , Suryaprakash Ganti , Ananth Saran Yalamarthy , Seshagiri Rao Madhavapeddy , Prabhu Sathyamurthy
- Applicant: Frore Systems Inc.
- Applicant Address: US CA San Jose
- Assignee: Frore Systems Inc.
- Current Assignee: Frore Systems Inc.
- Current Assignee Address: US CA San Jose
- Agency: Van Pelt, Yi & James LLP
- Main IPC: H05K7/20
- IPC: H05K7/20

Abstract:
An actuator usable in a cooling system is described. The actuator includes an anchored region and a cantilevered arm. The cantilevered arm extends outward from the anchored region. The cantilevered arm includes a step region, an extension region and an outer region. The step region extends outward from the anchored region and has a step thickness. The extension region extends outward from the step region and has an extension thickness less than the step thickness. The outer region extends outward from the extension region and has an outer thickness greater than the extension thickness.
Public/Granted literature
- US11470744B2 Engineered actuators usable in MEMS active cooling devices Public/Granted day:2022-10-11
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