Invention Grant
- Patent Title: Memory devices and methods of manufacturing the same
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Application No.: US16903990Application Date: 2020-06-17
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Publication No.: US11508744B2Publication Date: 2022-11-22
- Inventor: Jisung Cheon , Kiyoon Kang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2019-0146172 20191114
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; G11C5/02 ; G11C5/06 ; H01L27/11582 ; H01L29/792

Abstract:
A memory device may include a substrate; a first stack structure comprising a plurality of first gate layers and a plurality of first interlayer insulating layers alternately stacked on the substrate; a second stack structure comprising a plurality of second gate layers and a plurality of second interlayer insulating layers alternately stacked on the first stack structure; and a channel structure penetrating the first stack structure and the second stack structure, wherein the channel structure comprises a first portion in a first channel hole penetrating the first stack structure, a second portion in a second channel hole penetrating the second stack structure, and a first protrusion located in a first recess recessed into one layer of the plurality of first interlayer insulating layers from a side portion of the first channel hole.
Public/Granted literature
- US20210151452A1 MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2021-05-20
Information query
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