Invention Grant
- Patent Title: Substrate flipping device
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Application No.: US16942607Application Date: 2020-07-29
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Publication No.: US11511950B2Publication Date: 2022-11-29
- Inventor: Michael Minh Phan , Steven Trey Tindel , Paul Benjamin Reuter
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/68
- IPC: H01L21/68 ; B65G47/91 ; H01L21/687
Abstract:
A substrate flipping device includes a substrate securing assembly, a gripping actuator, and a rotary actuator. The gripping actuator is configured to pneumatically cause the substrate securing assembly to be in an open position to receive a substrate and configured to pneumatically cause the substrate securing assembly to be in a closed position to secure the substrate. The rotary actuator is configured to pneumatically cause the substrate securing assembly to rotate to a flipped position and to pneumatically rotate to a non-flipped position.
Public/Granted literature
- US20220033197A1 SUBSTRATE FLIPPING DEVICE Public/Granted day:2022-02-03
Information query
IPC分类:
