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公开(公告)号：US20250083308A1
公开(公告)日：2025-03-13
申请号：US18244495
申请日：2023-09-11
Applicant: Applied Materials, Inc.
Inventor： Damon K. Cox , Ali Utku Pehlivan , Paul Benjamin Reuter
IPC: B25J9/16 , H01L21/683
Abstract: A method includes causing an upper process kit ring to be removed from a lower process kit ring. The method further includes, responsive to causing the upper process kit ring to be removed from the lower process kit ring, causing, based on sensor data, a first position correction associated with the lower process kit ring. The method further includes, responsive to the first position correction, causing the upper process kit ring to be disposed on the lower process kit ring.
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公开(公告)号：US20230054584A1
公开(公告)日：2023-02-23
申请号：US17884088
申请日：2022-08-09
Applicant: Applied Materials, Inc.
Inventor： Paul Benjamin Reuter , Kristen Ikeda , Sushant S. Koshti , Jeffrey C. Hudgens
Abstract: A substrate processing system for an electronic device manufacturing system can include a factory interface forming an interior volume, and a partition disposed in the factory interface. The partition can divide the interior volume into a first factory interface chamber forming a second interior volume, and a second factory interface chamber forming a third interior volume. The partition can be configured to provide a first sealed environment in the first factory interface chamber and a second sealed environment in the second factory interface chamber.
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Patent Agency Ranking
公开(公告)号：US12297691B2
公开(公告)日：2025-05-13
申请号：US18196088
申请日：2023-05-11
Applicant: APPLIED MATERIALS, INC.
Abstract: The disclosure describes devices and systems for a seal, and methods for using said seal. A seal includes a base portion configured to couple to a groove formed by a first surface of a first component. The base portion includes a notch in a bottom side of the base portion configured to cause the base portion to laterally flex responsive to an installation force. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to an application of a threshold sealing force against the sealing portion.
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公开(公告)号：US09464732B2
公开(公告)日：2016-10-11
申请号：US13871671
申请日：2013-04-26
Applicant: APPLIED MATERIALS, INC.
Inventor： Paul Benjamin Reuter , Martin Jeffrey Salinas , Jared Ahmad Lee , Imad Yousif
IPC: C23C16/00 , F16L3/00 , H01L21/67 , H01L21/687
CPC classification number: F16L3/00 , H01L21/67017 , H01L21/6719 , H01L21/68785 , Y10T137/6966
Abstract: Substrate supports for use in process chambers having limited physical space for configuring chamber components are disclosed. In some embodiments, a substrate support may include a body having a support surface; a utilities feed coupled to the body and comprising a second portion coupled to and extending laterally away from the body beyond a diameter of the body, and first portion coupled to the second portion and extending perpendicularly away from the body; and a cover plate movably disposable beneath and with respect to the body between a first position disposed completely beneath the body, and a second position wherein the cover plate is disposed over the first portion of the utilities feed and includes a first portion disposed beneath the body, and wherein the first portion has a curved edge having a radius equal to the distance from a central axis of the support surface to the curved edge.
Abstract translation: 公开了用于配置室部件的具有有限物理空间的处理室中的基板支撑。 在一些实施例中，衬底支撑件可以包括具有支撑表面的主体; 耦合到所述主体并且包括耦合到所述主体并且远离所述主体的所述主体的第二部分超过所述主体的直径的第二部分，以及联接到所述第二部分并且垂直地远离所述主体延伸的第一部分; 以及盖板，其可移动地一次性地在主体之下并相对于主体移动，在完全位于主体下方的第一位置和第二位置之间，其中盖板设置在工具进料的第一部分之上，并且包括设置在主体下方的第一部分 ，并且其中所述第一部分具有弯曲边缘，其具有等于从所述支撑表面的中心轴线到所述弯曲边缘的距离的半径。
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公开(公告)号：US20240376768A1
公开(公告)日：2024-11-14
申请号：US18196088
申请日：2023-05-11
Applicant: APPLIED MATERIALS, INC.
Abstract: The disclosure describes devices and systems for a seal, and methods for using said seal. A seal includes a base portion configured to couple to a groove formed by a first surface of a first component. The base portion includes a notch in a bottom side of the base portion configured to cause the base portion to laterally flex responsive to an installation force. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to an application of a threshold sealing force against the sealing portion.
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公开(公告)号：US11511950B2
公开(公告)日：2022-11-29
申请号：US16942607
申请日：2020-07-29
Applicant: Applied Materials, Inc.
Inventor： Michael Minh Phan , Steven Trey Tindel , Paul Benjamin Reuter
IPC: H01L21/68 , B65G47/91 , H01L21/687
Abstract: A substrate flipping device includes a substrate securing assembly, a gripping actuator, and a rotary actuator. The gripping actuator is configured to pneumatically cause the substrate securing assembly to be in an open position to receive a substrate and configured to pneumatically cause the substrate securing assembly to be in a closed position to secure the substrate. The rotary actuator is configured to pneumatically cause the substrate securing assembly to rotate to a flipped position and to pneumatically rotate to a non-flipped position.
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公开(公告)号：US20220033197A1
公开(公告)日：2022-02-03
申请号：US16942607
申请日：2020-07-29
Applicant: Applied Materials, Inc.
Inventor： Michael Minh Phan , Steven Trey Tindel , Paul Benjamin Reuter
IPC: B65G47/91
Abstract: A substrate flipping device includes a substrate securing assembly, a gripping actuator, and a rotary actuator. The gripping actuator is configured to pneumatically cause the substrate securing assembly to be in an open position to receive a substrate and configured to pneumatically cause the substrate securing assembly to be in a closed position to secure the substrate. The rotary actuator is configured to pneumatically cause the substrate securing assembly to rotate to a flipped position and to pneumatically rotate to a non-flipped position.
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