Invention Grant
- Patent Title: Adaptive alignment
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Application No.: US17297691Application Date: 2019-11-26
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Publication No.: US11513446B2Publication Date: 2022-11-29
- Inventor: Greger Göte Andersson , Krishanu Shome , Zahrasadat Dastouri , Igor Matheus Petronella Aarts
- Applicant: ASML Holding N.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: DiBerardino McGovern IP Group LLC
- International Application: PCT/EP2019/082502 WO 20191126
- International Announcement: WO2020/114829 WO 20200611
- Main IPC: G03F9/00
- IPC: G03F9/00 ; G03F7/20

Abstract:
A method of applying a measurement correction includes determining an orthogonal subspace used to characterize a first principal component of the measurement and a second principal component of the measurement, and rotating the orthogonal subspace by a first angle such that the first principle component rotates to become a first factor vector and the second principle component rotates to become a second factor vector. An asymmetry vector is generated by rotating the second factor vector by a second angle, where the asymmetry vector and the first factor vector define a non-orthogonal subspace. An asymmetry contribution is determined in the measurement based on the projection of the measurement onto the first factor vector in the non-orthogonal subspace. The method also includes subtracting the asymmetry contribution from the measurement.
Public/Granted literature
- US20210397103A1 ADAPTIVE ALIGNMENT Public/Granted day:2021-12-23
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