Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17103872Application Date: 2020-11-24
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Publication No.: US11515316B2Publication Date: 2022-11-29
- Inventor: Tzu-Ping Chen
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN202011221820.5 20201105
- Main IPC: H01L27/11524
- IPC: H01L27/11524 ; H01L27/11558 ; H01L27/11519

Abstract:
A semiconductor memory device includes a select transistor and a floating gate transistor on a substrate. The select transistor includes a select gate, a select gate oxide layer and a drain doping region. The floating gate transistor includes a floating gate, a floating gate oxide layer, a source doping region, a first tunnel doping region and a second tunnel doping region under the floating gate, a first tunnel oxide layer on the first tunnel doping region, and a second tunnel oxide layer on the second tunnel doping region. The floating gate oxide layer is disposed between the first tunnel oxide layer and the second tunnel oxide layer. A lightly doped diffusion region surrounds the source doping region and the second tunnel doping region.
Public/Granted literature
- US20220139938A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-05-05
Information query
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