- 专利标题: Flow rate control system and flow rate measurement method
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申请号: US17264173申请日: 2019-07-16
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公开(公告)号: US11519769B2公开(公告)日: 2022-12-06
- 发明人: Masaaki Nagase , Satoru Yamashita , Masayoshi Kawashima , Masahiko Takimoto , Kouji Nishino , Nobukazu Ikeda
- 申请人: FUJIKIN INCORPORATED
- 申请人地址: JP Osaka
- 专利权人: FUJIKIN INCORPORATED
- 当前专利权人: FUJIKIN INCORPORATED
- 当前专利权人地址: JP Osaka
- 代理机构: Studebaker & Brackett PC
- 优先权: JPJP2018-143005 20180730
- 国际申请: PCT/JP2019/027880 WO 20190716
- 国际公布: WO2020/026784 WO 20200206
- 主分类号: G01F1/88
- IPC分类号: G01F1/88
摘要:
A control unit 3 of a flow rate control system 1 comprises: a recording unit 31 for recording measured values of a pressure sensor P and a temperature sensor T, a storage unit 32 for storing volume data between a first valve V1 and a second valve V2 corresponding to the measured value of the pressure sensor P, and an arithmetic unit 33 for calculating a flow rate based on a first pressure value P1 and a first temperature value T1 measured after opening the first valve V1 and the second valve V2 to flow a gas and then closing the first valve V1 and the second valve V2 simultaneously in a state where the gas is flowing; a second pressure value P2 and a second temperature value T2 measured after opening the first valve V1 and the second valve V2 to flow a gas, closing the second valve V2 in a state where the gas is flowing, and then closing the first valve V1 after a predetermined time Δt has elapsed; and a volume value V between the first valve V1 and the second valve V2 which corresponds to the second pressure value P2.
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