Invention Grant
- Patent Title: Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics
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Application No.: US16827282Application Date: 2020-03-23
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Publication No.: US11520138B2Publication Date: 2022-12-06
- Inventor: Nicolo' Boni , Roberto Carminati , Massimiliano Merli
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: IT102019000004199 20190322
- Main IPC: H02N2/02
- IPC: H02N2/02 ; G02B26/08 ; G02B26/10 ; G03B21/00

Abstract:
A microelectromechanical structure includes a body of semiconductor material having a fixed frame internally defining a cavity, a mobile mass elastically suspended in the cavity and movable with a first resonant movement about a first rotation axis and with a second resonant movement about a second rotation axis, orthogonal to the first axis. First and second pairs of supporting elements, extending in cantilever fashion in the cavity, are rigidly coupled to the frame, and are piezoelectrically deformable to cause rotation of the mobile mass about the first and second rotation axes. First and second pairs of elastic-coupling elements are elastically coupled between the mobile mass and the first and the second pairs of supporting elements. The first and second movements of rotation of the mobile mass are decoupled from one another and do not interfere with one another due to the elastic-coupling elements of the first and second pairs.
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