发明授权
- 专利标题: Method to integrate DC and RF phase change switches into high-speed SiGe BiCMOS
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申请号: US16544212申请日: 2019-08-19
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公开(公告)号: US11522010B2公开(公告)日: 2022-12-06
- 发明人: Patrick B. Shea , Robert M. Young , Keith H. Chung , Andris Ezis , Ishan Wathuthanthri
- 申请人: Northrop Grumman Systems Corporation
- 申请人地址: US VA Falls Church
- 专利权人: Northrop Grumman Systems Corporation
- 当前专利权人: Northrop Grumman Systems Corporation
- 当前专利权人地址: US VA Falls Church
- 代理机构: Edell, Shapiro & Finnan, LLC
- 主分类号: H01L27/24
- IPC分类号: H01L27/24 ; H01L45/00 ; H01L21/8249
摘要:
A method of integrating a phase change switch (PCS) into a Bipolar (Bi)/Complementary Metal Oxide Semiconductor (CMOS) (BiCMOS) process, comprises providing a base structure including BiCMOS circuitry on a semiconductor substrate, and forming on the base structure a dielectric contact window layer having metal through-plugs that contact the BiCMOS circuitry. The method includes constructing the PCS on the contact window layer. The PCS includes: a phase change region, between ohmic contacts on the phase change region, to operate as a switch controlled by heat. The method further includes forming, on the contact window layer and the PCS, a stack of alternating patterned metal layers and dielectric layers that interconnect the patterned metal layers, such that the stack connects a first of the ohmic contacts to the BiCMOS circuitry and provides connections to a second of the ohmic contacts and to the resistive heater.
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