Invention Grant
- Patent Title: Substrate transfer systems and methods of use thereof
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Application No.: US16825450Application Date: 2020-03-20
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Publication No.: US11527424B2Publication Date: 2022-12-13
- Inventor: Alex Berger , Jeffrey Hudgens , Eric Englhardt
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G54/02 ; B25J11/00

Abstract:
Disclosed herein are systems and methods relating to a transfer chamber for an electronic device processing system. The transfer chamber can include a first magnetic levitation track having a face-up orientation and a second magnetic levitation track spaced from the first magnetic levitation track and having a face-down orientation. The system can include substrate carriers that move along the first and second magnetic levitation tracks where each substrate carrier includes a magnet on a bottom portion to interact with a first magnetic field and a second magnet on a top portion to interact with a second magnetic field. The system also can include at least one lift pin assembly to move the substrate carriers in a vertical direction between the first and second magnetic levitation tracks.
Public/Granted literature
- US20210296150A1 SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF Public/Granted day:2021-09-23
Information query
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