- 专利标题: Devices comprising crystalline materials and related systems
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申请号: US16898029申请日: 2020-06-10
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公开(公告)号: US11532699B2公开(公告)日: 2022-12-20
- 发明人: Michael Mutch , Manuj Nahar , Wayne I. Kinney
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: TraskBritt
- 主分类号: H01L29/04
- IPC分类号: H01L29/04 ; H01L21/02 ; H01L29/161 ; H01L21/324 ; H01L29/786 ; H01L27/105
摘要:
A method includes forming a semiconductor structure. The structure includes a first material, a blocking material, a second material in an amorphous form, and a third material in an amorphous form. The blocking material is disposed between the first material and the second material. At least the second material and the third material each comprise silicon and/or germanium. The structure is exposed to a temperature above a crystallization temperature of the third material and below a crystallization temperature of the second material. Semiconductor structures, memory devices, and systems are also disclosed.
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