Invention Grant
- Patent Title: Substrate treatment apparatus
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Application No.: US17388356Application Date: 2021-07-29
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Publication No.: US11534859B2Publication Date: 2022-12-27
- Inventor: Duk Hyun Son , Hyung Joon Kim
- Applicant: SEMES Co., Ltd.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES Co., Ltd.
- Current Assignee: SEMES Co., Ltd.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: RatnerPrestia
- Priority: KR10-2018-0149761 20181128
- Main IPC: H01L21/68
- IPC: H01L21/68 ; B23K26/042 ; B25J9/04 ; G03F9/00 ; B25J9/10 ; B25J9/08

Abstract:
A substrate treatment apparatus includes a transport part to transport a transparent rectangular substrate, a substrate support part to support the substrate, light generators to irradiate two different lights onto the moving substrate, and sense the irradiated lights, and a controller to determine a posture of the substrate with reference to the sensed lights and control the transport part such that the substrate is seated on the substrate support part in a default posture that is preset. The controller determines the posture of the transparent rectangular substrate with respect to the default posture using a time difference between a time point at which a first light of the two different lights is not transmitted through an edge of the transparent rectangular substrate and a time point at which a second light of the two different lights is not transmitted through the edge of the transparent rectangular substrate.
Public/Granted literature
- US20210354236A1 SUBSTRATE TREATMENT APPARATUS Public/Granted day:2021-11-18
Information query
IPC分类: