Invention Grant
- Patent Title: Diffractive optical element, projection device, and measurement device
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Application No.: US17114985Application Date: 2020-12-08
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Publication No.: US11536981B2Publication Date: 2022-12-27
- Inventor: Ryota Murakami , Motoshi Nakayama
- Applicant: AGC INC.
- Applicant Address: JP Tokyo
- Assignee: AGC INC.
- Current Assignee: AGC INC.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2018-110909 20180611
- Main IPC: G02B5/18
- IPC: G02B5/18 ; G02B27/42 ; G01B11/25 ; G02B27/44

Abstract:
A diffractive optical element includes: a substrate; a protrusion and recess portion that is formed on one surface of the substrate and imposes predetermined diffraction on incident light; and an antireflection layer provided between the substrate and the protrusion and recess portion. An effective refractive index difference Δn in a wavelength range of the incident light between a first medium constituting a protrusion of the protrusion and recess portion and a second medium constituting a recess of the protrusion and recess portion is 0.70 or more. An exit angle range θout of diffraction light exiting from the protrusion and recess portion when the incident light enters the substrate from a normal direction of the substrate is 60° or more. Total efficiency of diffraction light exiting from the protrusion and recess portion in the exit angle range is 65% or more.
Public/Granted literature
- US20210088802A1 DIFFRACTIVE OPTICAL ELEMENT, PROJECTION DEVICE, AND MEASUREMENT DEVICE Public/Granted day:2021-03-25
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