Invention Grant
- Patent Title: Pellicle for flat panel display photomask
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Application No.: US17444927Application Date: 2021-08-12
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Publication No.: US11537050B2Publication Date: 2022-12-27
- Inventor: Bryan S. Kasprowicz , Christopher Progler
- Applicant: PHOTRONICS, INC.
- Applicant Address: US CT Brookfield
- Assignee: PHOTRONICS, INC.
- Current Assignee: PHOTRONICS, INC.
- Current Assignee Address: US CT Brookfield
- Agency: Amster, Rothstein & Ebenstein LLP
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F1/64 ; G03F1/38 ; G03F1/62

Abstract:
A pellicle assembly for large-size photomasks including a frame member configured to be affixed to a large-size photomask substrate, a substantially rigid and transparent pellicle membrane affixed to the frame member so as to protect at least a portion of the large-size photomask substrate from contamination during usage, storage and/or transport, and a coating on at least one of top and bottom surfaces of the pellicle membrane that binds the pellicle membrane to prevent separation of pellicle membrane material in the event of breakage.
Public/Granted literature
- US20210389664A1 PELLICLE FOR FLAT PANEL DISPLAY PHOTOMASK Public/Granted day:2021-12-16
Information query
IPC分类: