Invention Grant
- Patent Title: Laser apparatus and extreme ultraviolet light generation system
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Application No.: US16429090Application Date: 2019-06-03
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Publication No.: US11539180B2Publication Date: 2022-12-27
- Inventor: Yoshiaki Kurosawa
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/13
- IPC: H01S3/13 ; H01S3/102 ; H01S3/131 ; H01S3/23 ; H01S3/134

Abstract:
A laser apparatus according to an aspect of the present disclosure includes: a master oscillator; at least one amplifier disposed on an optical path of a first pulse laser beam output from the master oscillator; a sensor disposed on an optical path of a second pulse laser beam output from the at least one amplifier; and a laser controller. The laser controller causes the laser apparatus to perform burst oscillation based on a burst signal from an external device, and performs processing of controlling a beam parameter based on a sensor output signal obtained from the sensor in a burst duration, and processing of detecting self-oscillation light from the amplifier based on a sensor output signal obtained from the sensor in a burst stop duration.
Public/Granted literature
- US20190288478A1 LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM Public/Granted day:2019-09-19
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