- Patent Title: X-ray based evaluation of a status of a structure of a substrate
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Application No.: US17153765Application Date: 2021-01-20
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Publication No.: US11543368B2Publication Date: 2023-01-03
- Inventor: Dror Shemesh
- Applicant: APPLIED MATERIALS ISRAEL LTD.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G01N23/2252
- IPC: G01N23/2252 ; G01N23/2206
Abstract:
A method for x-ray based evaluation of a status of a structure of a substrate, the method may include acquiring an electron image of a region of the substrate, the region comprises the structure; acquiring an x-ray image of the structure; and evaluating the status of the structure, wherein the evaluating is based at least on a number of x-ray photons that were emitted from the structure.
Public/Granted literature
- US20210181128A1 X-RAY BASED EVALUATION OF A STATUS OF A STRUCTURE OF A SUBSTRATE Public/Granted day:2021-06-17
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