Method of examining a sample using a charged particle microscope

    公开(公告)号:US11971372B2

    公开(公告)日:2024-04-30

    申请号:US16886716

    申请日:2020-05-28

    申请人: FEI Company

    摘要: The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample; scanning said charged particle beam over said sample at a plurality of sample locations; and detecting, using a first detector, emissions of a first type from the sample in response to the beam scanned over the plurality of sample locations. Spectral information of detected emissions of the first type is used to assign a plurality of mutually different phases to said sample at said plurality of sample locations. Information relating to at least one previously assigned phase and its respective sample location is used for establishing an estimated phase for at least one other of the plurality of sample locations. Said estimated phase is assigned to said other sample location. A control unit is used to provide a data representation of said sample containing at least information on said plurality of sample locations and said phases.

    A Detection System and Method for Investigating a Content of an Item

    公开(公告)号:US20230266257A1

    公开(公告)日:2023-08-24

    申请号:US18020673

    申请日:2021-08-11

    申请人: Dynaxion B.V.

    摘要: A detection system and method for investigating a content of an item to be inspected, comprising an inspection space for receiving said item and a neutron generator for generating a directional beam of energetic neutrons, directed towards said inspection space. A detector is responsive to interaction products coming from said inspection space and impinging substantially along a detection axis upon interaction of said energetic particles with nuclei of material of said item. Said neutron generator is configured to expose said inspection space to a uni-directional beam of energetic neutrons along an interrogation axis through said inspection space. Said directional beam has a smaller cross section than a corresponding cross section of said inspection space and smaller than a corresponding cross section of said item to be inspected. Said detector detects said interaction products along a detection axis upon interaction of said uni-directional beam of energetic neutrons with said item to be inspected.

    ENHANCED ARCHITECTURE FOR HIGH-PERFORMANCE DETECTION DEVICE

    公开(公告)号:US20230170179A1

    公开(公告)日:2023-06-01

    申请号:US17922780

    申请日:2021-04-23

    发明人: Yongxin WANG

    IPC分类号: H01J37/244 G01N23/2206

    摘要: A detector includes a set of sensing elements, first section circuitry communicatively coupling a first set of sensing elements to an input of first signal processing circuitry, second section circuitry communicatively coupling a second set of sensing elements to an input of second signal processing circuitry, and interconnection circuitry communicatively coupling an output of the first signal processing circuitry to an output of the second signal processing circuitry. The interconnection circuitry may include an interconnection layer having interconnection switching elements communicatively coupled to outputs of analog signal paths of the detector. Interconnection switching elements may communicatively couple the outputs of adjacent analog signal paths. The detector may also include signal processing circuitry that includes a plurality of converters. The interconnection circuitry may be configured to selectively couple outputs of the first and second signal processing circuitry to the converters.

    X-ray based evaluation of a status of a structure of a substrate

    公开(公告)号:US11543368B2

    公开(公告)日:2023-01-03

    申请号:US17153765

    申请日:2021-01-20

    发明人: Dror Shemesh

    IPC分类号: G01N23/2252 G01N23/2206

    摘要: A method for x-ray based evaluation of a status of a structure of a substrate, the method may include acquiring an electron image of a region of the substrate, the region comprises the structure; acquiring an x-ray image of the structure; and evaluating the status of the structure, wherein the evaluating is based at least on a number of x-ray photons that were emitted from the structure.

    X-RAY EXAMINATION DEVICE
    7.
    发明申请

    公开(公告)号:US20220381712A1

    公开(公告)日:2022-12-01

    申请号:US17804048

    申请日:2022-05-25

    申请人: Anton Paar GmbH

    IPC分类号: G01N23/2206 G01N23/20016

    摘要: A device for examining a sample by means of X-radiation is provided, the device comprising: a radiation generation system for generating primary radiation; a first goniometer arm on which the radiation generation system is mounted and which is pivotable about a goniometer axis; a detection system configured to detect secondary radiation emanating from the sample; a second goniometer arm on which the detection system is mounted and which is pivotable about the goniometer axis; an evacuable sample chamber within which the sample is arrangeable in a sample region encompassing a portion of the goniometer axis, the sample chamber being delimited by a sample chamber wall which has a transmission region which is transmissive to the primary radiation and is vacuum-tight, in order to allow the primary radiation to penetrate into the sample chamber and to impinge on the sample region at different angles of incidence; wherein the sample chamber has a first opening in a detection beam path, at which the sample chamber and the detection system are connectable in a vacuum-tight manner so that the detection beam path is evacuable.

    Density analysis of geological sample

    公开(公告)号:US11366073B2

    公开(公告)日:2022-06-21

    申请号:US17264236

    申请日:2019-07-18

    申请人: OREXPLORE AB

    摘要: An apparatus (100) for analysing a sample (101) comprising a drill core sample or drill cuttings is provided. The apparatus comprises an X-ray geological structure data unit configured to scan the sample to obtain a data set indicating a volume of the sample, a fluorescence detector (109) configured to measure fluorescent radiation emanating from the sample (101) when irradiated by the X-ray beam, and a weighing unit (105) configured to weigh the sample. The apparatus further comprises a processing unit (104) configured to calculate a density of the sample (101) based on the data set obtained by the X-ray geological structure data unit, the fluorescent radiation measured by the fluorescence detectors, and the weight provided by the weighing unit.

    CONTROLLED MANUFACTURE AND NANO-LEVEL EVALUATION OF KEROGEN-RICH RESERVOIR ROCK

    公开(公告)号:US20210263006A1

    公开(公告)日:2021-08-26

    申请号:US17180416

    申请日:2021-02-19

    摘要: Controlled manufacture and nano-level evaluation of kerogen-rich reservoir rock can be implemented as a method. A clay mineral found in kerogen-rich shale is selected. An organic component found in kerogen-rich shale is selected. Multiple concentrations of the clay mineral are selected. Multiple concentrations of the organic component are selected. Multiple kerogen-rich shale samples are fabricated. Each sample includes a first concentration of the multiple concentrations of the clay mineral and a second concentration of the multiple concentrations of the organic component. A microscale beam is formed of each fabricated sample. A maximum dimension of the microscale beam is at most 100 μm. A mechanical experiment is performed on the microscale beam of each fabricated sample. The mechanical experiment includes a tension test or a compression test. The mechanical experiment on the microscale beam of each fabricated sample is imaged using a scanning electron microscope or a transmission electron microscope. A material parameter of the microscale beam of each fabricated sample is determined based on results of the mechanical experiment and images obtained responsive to the imaging. Effects of the clay mineral on the kerogen-rich shale are determined based on the material parameter of the microscale beam of each fabricated sample.