公开(公告)号：US20250060324A1

公开(公告)日：2025-02-20

申请号：US18620332

申请日：2024-03-28

Applicant: Tokyo Electron Limited

Inventor： Francisco Machuca ,  Vi Vuong ,  Andrej Mitrovic ,  Xinkang Tian ,  Holger Tuitje

IPC: G01N23/2206 ,  G01N21/95 ,  G01N23/201 ,  G01N23/223

Abstract: A method of characterizing a device under test (DUT) includes illuminating the DUT with a broadband optical beam within an optical field of view (FOV), illuminating the DUT with an X-ray beam within an X-ray FOV overlapping the optical FOV, and concurrently acquiring X-ray metrology information, e.g., one or more X-ray images utilizing various modalities, such as absorption, phase contrast difference, darkfield, small angle X-ray scattering (SAXS) and/or fluorescence, from the X-ray FOV and a plurality of optical images of the optical FOV, each of the optical images corresponding to respective selected wavelengths of the broadband optical beam from each of ultraviolet, visible, and infrared wavelengths, for example including deep ultraviolet, near infrared, or short-wavelength infrared wavelengths. The DUT may be one or more substrates, e.g., stacked, and include electronic devices such as three-dimensional integrated devices.

公开(公告)号：US20240418660A1

公开(公告)日：2024-12-19

申请号：US18797255

申请日：2024-08-07

Applicant: FEI COMPANY

Inventor： Daniel Totonjian ,  Aurelien Philippe Jean Maclou Botman ,  Milos Toth

IPC: G01N23/2206 ,  G01N23/203 ,  G01N23/2252 ,  G01N23/2257

Abstract: An apparatus comprises: a focused ion beam (FIB) column within a vacuum chamber configured to direct ions comprising a mixture of protons and non-hydrogen ions onto a sample, wherein the kinetic energy of ions of the mixture is not greater than 50 kilo-electron-Volts (keV); and an X-ray detector configured to detect and measure X-rays that are emitted from the sample in response to the impingement of the protons and non-hydrogen ions onto the sample. The apparatus may further comprise an electron microscope column within the vacuum chamber configured to direct and focus a beam of electrons onto the sample and to detect secondary electrons or backscattered electrons that are emitted from the sample in response to the impingement of the beam of electrons onto the sample. The electron microscope may generate an image of a sample area that is milled by the FIB column.

公开(公告)号：US20240385131A1

公开(公告)日：2024-11-21

申请号：US18663519

申请日：2024-05-14

Applicant: JEOL Ltd.

Inventor： Takeshi Otsuka ,  Kei Nagatomo

IPC: G01N23/2251 ,  G01N23/203 ,  G01N23/2206

Abstract: An analysis device includes an electron beam source that irradiates a sample with a charged particle beam, and a detection unit having a plurality of detection regions that detects electrons emitted from the sample irradiated with the charged particle beam. The analysis device includes an arithmetic processing unit 100 that performs predetermined arithmetic processing on strength distribution of a plurality of detection signals respectively detected by the plurality of detection regions.

公开(公告)号：US20240192153A1

公开(公告)日：2024-06-13

申请号：US18553264

申请日：2022-03-31

Applicant: TOPCON CORPORATION ,  RIKEN

Inventor： Shigenori NAGANO ,  Satoshi YANOBE ,  Akira YAJIMA ,  Hanako AIKOH ,  Satoru ISHIGURO ,  Yoshie OTAKE ,  Yasuo WAKABAYASHI ,  Masato TAKAMURA

IPC: G01N23/222 ,  G01N23/204 ,  G01N23/2206

CPC classification number: G01N23/222 ,  G01N23/204 ,  G01N23/2206 ,  G01N2223/0745

Abstract: A nondestructive inspection system 1 is provided with: a neutron radiation unit 10 capable of radiating a first neutron dose of neutrons; a neutron detection unit 20 capable of detecting a second neutron dose of neutrons scattered inside an inspection object A upon radiation of neutrons from the neutron radiation unit 10; a gamma ray detection unit 30 capable of detecting a gamma ray dose released from the inspection object A upon radiation of neutrons from the neutron radiation unit 10; and an analysis unit 50 that calculates the contained amount of a predetermined substance on the basis of the gamma ray dose and corrects the contained amount of the predetermined substance on the basis of the first neutron dose and the second neutron dose.

公开(公告)号：US11971372B2

公开(公告)日：2024-04-30

申请号：US16886716

申请日：2020-05-28

Applicant: FEI Company

Inventor： Jan Klusá{hacek over (c)}ek ,  Tomá{hacek over (s)} Tůma ,  Ji{hacek over (r)}í Pet{hacek over (r)}ek

IPC: G01N23/2251 ,  G01N23/2206 ,  G01N23/2252 ,  G06V10/762 ,  G06V20/69

CPC classification number: G01N23/2251 ,  G01N23/2206 ,  G01N23/2252 ,  G06V10/763 ,  G06V20/69

Abstract: The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample; scanning said charged particle beam over said sample at a plurality of sample locations; and detecting, using a first detector, emissions of a first type from the sample in response to the beam scanned over the plurality of sample locations. Spectral information of detected emissions of the first type is used to assign a plurality of mutually different phases to said sample at said plurality of sample locations. Information relating to at least one previously assigned phase and its respective sample location is used for establishing an estimated phase for at least one other of the plurality of sample locations. Said estimated phase is assigned to said other sample location. A control unit is used to provide a data representation of said sample containing at least information on said plurality of sample locations and said phases.

公开(公告)号：US20230266257A1

公开(公告)日：2023-08-24

申请号：US18020673

申请日：2021-08-11

Applicant: Dynaxion B.V.

Inventor： Emma Wooldridge ,  Cornelis Pauwel Datema ,  Maximilian Messmer ,  Enrico Junior Schioppa

IPC: G01N23/2206 ,  G01N23/222 ,  G01N23/09

CPC classification number: G01N23/2206 ,  G01N23/222 ,  G01N23/09 ,  G01N2223/3306 ,  G01N2223/643 ,  G01N2223/316 ,  G01N2223/204

Abstract: A detection system and method for investigating a content of an item to be inspected, comprising an inspection space for receiving said item and a neutron generator for generating a directional beam of energetic neutrons, directed towards said inspection space. A detector is responsive to interaction products coming from said inspection space and impinging substantially along a detection axis upon interaction of said energetic particles with nuclei of material of said item. Said neutron generator is configured to expose said inspection space to a uni-directional beam of energetic neutrons along an interrogation axis through said inspection space. Said directional beam has a smaller cross section than a corresponding cross section of said inspection space and smaller than a corresponding cross section of said item to be inspected. Said detector detects said interaction products along a detection axis upon interaction of said uni-directional beam of energetic neutrons with said item to be inspected.

公开(公告)号：US11698354B1

公开(公告)日：2023-07-11

申请号：US18069895

申请日：2022-12-21

Applicant: BEIJING MUNICIPAL RESEARCH INSTITUTE OF ENVIRONMENTAL PROTECTION

Inventor： Lina Zhang ,  Lin Jiang ,  Tianxiang Xia ,  Xiaoying Zhu

IPC: G01N23/223 ,  G01N23/2206 ,  G01N23/2202

CPC classification number: G01N23/223 ,  G01N23/2202 ,  G01N2223/076 ,  G01N2223/1016 ,  G01N2223/301 ,  G01N2223/304 ,  G01N2223/3037 ,  G01N2223/616 ,  G01N2223/645 ,  G01N2223/652

Abstract: Provided is a portable XRF data screening method for heavy metal contaminated soil, relating to the technical field of heavy metal contamination test. The method includes the following steps: (1) laboratory test; (2) XRF test; and (3) calculation of a recheck interval: dividing test data into four areas by a contaminant screening value Xc as a horizontal line and a correlation-derived site screening value as a vertical line to calculate the recheck interval. The method is simple and efficient, and is beneficial to saving investigation costs and shortening a project cycle.

公开(公告)号：US20230170179A1

公开(公告)日：2023-06-01

申请号：US17922780

申请日：2021-04-23

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG

IPC: H01J37/244 ,  G01N23/2206

CPC classification number: H01J37/244 ,  G01N23/2206 ,  G01N2223/507 ,  G01N2223/6116 ,  H01J2237/2441 ,  H01J2237/24495 ,  H01J2237/24521 ,  H01J37/28

Abstract: A detector includes a set of sensing elements, first section circuitry communicatively coupling a first set of sensing elements to an input of first signal processing circuitry, second section circuitry communicatively coupling a second set of sensing elements to an input of second signal processing circuitry, and interconnection circuitry communicatively coupling an output of the first signal processing circuitry to an output of the second signal processing circuitry. The interconnection circuitry may include an interconnection layer having interconnection switching elements communicatively coupled to outputs of analog signal paths of the detector. Interconnection switching elements may communicatively couple the outputs of adjacent analog signal paths. The detector may also include signal processing circuitry that includes a plurality of converters. The interconnection circuitry may be configured to selectively couple outputs of the first and second signal processing circuitry to the converters.

公开(公告)号：US11543368B2

公开(公告)日：2023-01-03

申请号：US17153765

申请日：2021-01-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Dror Shemesh

IPC: G01N23/2252 ,  G01N23/2206

Abstract: A method for x-ray based evaluation of a status of a structure of a substrate, the method may include acquiring an electron image of a region of the substrate, the region comprises the structure; acquiring an x-ray image of the structure; and evaluating the status of the structure, wherein the evaluating is based at least on a number of x-ray photons that were emitted from the structure.

公开(公告)号：US20220381712A1

公开(公告)日：2022-12-01

申请号：US17804048

申请日：2022-05-25

Applicant: Anton Paar GmbH

Inventor： Josef Gautsch ,  Helmut Gartler

IPC: G01N23/2206 ,  G01N23/20016

Abstract: A device for examining a sample by means of X-radiation is provided, the device comprising: a radiation generation system for generating primary radiation; a first goniometer arm on which the radiation generation system is mounted and which is pivotable about a goniometer axis; a detection system configured to detect secondary radiation emanating from the sample; a second goniometer arm on which the detection system is mounted and which is pivotable about the goniometer axis; an evacuable sample chamber within which the sample is arrangeable in a sample region encompassing a portion of the goniometer axis, the sample chamber being delimited by a sample chamber wall which has a transmission region which is transmissive to the primary radiation and is vacuum-tight, in order to allow the primary radiation to penetrate into the sample chamber and to impinge on the sample region at different angles of incidence; wherein the sample chamber has a first opening in a detection beam path, at which the sample chamber and the detection system are connectable in a vacuum-tight manner so that the detection beam path is evacuable.