Invention Grant
- Patent Title: Systems and methods for operating a MEMS device based on sensed temperature gradients
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Application No.: US17516245Application Date: 2021-11-01
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Publication No.: US11548780B2Publication Date: 2023-01-10
- Inventor: David deKoninck , Varun Subramaniam Kumar , Matthew Julian Thompson , Vadim Tsinker , Logeeswaran Veerayah Jayaraman , Sarah Nitzan , Houri Johari-Galle , Jongwoo Shin , Le Jin
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Haley Guiliano LLP
- Agent Joshua Van Hoven; Stefan D. Osterbur
- Main IPC: G01L19/04
- IPC: G01L19/04 ; G01K1/20 ; B81B7/00 ; G01L9/00
Abstract:
An exemplary microelectromechanical device includes a MEMS layer, portions of which respond to an external force in order to measure the external force. A substrate layer is located below the MEMS layer and an anchor couples the substrate layer and MEMS layer to each other. A plurality of temperature sensors are located within the substrate layer to identify a temperature gradient being experienced by the MEMS device. Compensation is performed or operations of the MEMS device are modified based on temperature gradient.
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