Invention Grant
- Patent Title: Method and device for generating (quasi-) periodic interference patterns
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Application No.: US17224466Application Date: 2021-04-07
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Publication No.: US11555745B2Publication Date: 2023-01-17
- Inventor: Niels Verellen , Dmitry Kouznetsov , Pol Van Dorpe
- Applicant: IMEC VZW , Katholieke Universiteit Leuven, KU LEUVEN R&D
- Applicant Address: BE Leuven; BE Leuven
- Assignee: IMEC VZW,Katholieke Universiteit Leuven, KU LEUVEN R&D
- Current Assignee: IMEC VZW,Katholieke Universiteit Leuven, KU LEUVEN R&D
- Current Assignee Address: BE Leuven; BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP20169757 20200416
- Main IPC: G01J9/02
- IPC: G01J9/02 ; G01N21/64 ; G02B21/16

Abstract:
Example embodiments relate to methods and devices for generating (quasi-) periodic interference patterns. One embodiment includes a method for generating an interference pattern using multi-beam interference of electromagnetic radiation. The method includes computing a set of grid points in a complex plane representing a grid with a desired symmetry. The method also includes selecting a radius of a virtual circle. Additionally, the method includes selecting a set of grid points in the complex plane that lies on the virtual circle centered around a virtual center point. Further, the method includes associating an argument of each grid point of the selected set of grid points in the complex plane with a propagation direction of plane waves or quasi plane waves or parallel wave fronts. In addition, the method includes obtaining the interference pattern that is a superposition of the plane waves or quasi plane waves or parallel wave fronts.
Public/Granted literature
- US20210325254A1 Method and Device for Generating (Quasi-) Periodic Interference Patterns Public/Granted day:2021-10-21
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