Invention Grant
- Patent Title: Semiconductor device, manufacturing method thereof, and display device including the semiconductor device
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Application No.: US17037769Application Date: 2020-09-30
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Publication No.: US11557612B2Publication Date: 2023-01-17
- Inventor: Shunpei Yamazaki , Junichi Koezuka , Kenichi Okazaki , Masami Jintyou , Yukinori Shima
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: JP2016-048704 20160311,JP2016-125378 20160624
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L21/02 ; G02F1/1368 ; H01L29/04 ; H01L29/24 ; H01L29/66 ; G02F1/1333 ; H01L27/32

Abstract:
To improve field-effect mobility and reliability of a transistor including an oxide semiconductor film. Provided is a semiconductor device including an oxide semiconductor film. The semiconductor device includes a first insulating film, the oxide semiconductor film over the first insulating film, a second insulating film and a third insulating film over the oxide semiconductor film, and a gate electrode over the second insulating film. The oxide semiconductor film includes a first oxide semiconductor film, a second oxide semiconductor film over the first oxide semiconductor film, and a third oxide semiconductor film over the second oxide semiconductor film. The first to third oxide semiconductor films contain the same element. The second oxide semiconductor film includes a region where the crystallinity is lower than the crystallinity of one or both of the first oxide semiconductor film and the third oxide semiconductor film.
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